INFICON Sensistor ILS500F Leak Detection System - Manual (Page 63)

63 Maintenance Instructions
ninp69e1-a (1410)
9.2 Maintenance
9.2.1 Tools and Safety Equipment
When performing regular maintenance of the ILS500 F the following equipment is
needed.
9.2.2 Interior View
Description Note
Allen Keys (Hexagonal 3 and 4 mm)
Torx Key (T25)
Screwdriver (Philip 1 or Pozidrive 1
Protective Eyewear When performing tooling output
test.
Protective Ear Plugs When performing tooling output
test.
1 Pilot Valve 6
2 Pilot Valve 1
3 Venturi Pump (Ejector)
4 Evacuation Valve
1 2 3
4
5
6
10
7
8 9