INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 15)

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IQS-233 Operating Manual
1.2 How To Contact INFICON
Worldwide customer support information is available under Contact >> Support
Worldwide at
www.inficon.com :
 Sales and Customer Service
 Technical Support
 Repair Service
If you are experiencing a problem with your IQS-233 Codeposition software,
please have the following information readily available:
 The Sales Order or PO number of the software purchase.
 The version of IQS-233 Codeposition software. See Figure 2-54 on page 2-72 .
 The version of Windows operating system.
 A description of the problem.
 An explanation of any corrective action that you may have already attempted.
 The exact wording of any error messages that you may have received.
1.3 Software Specifications
1.3.1 Display
Graphs . . . . . . . . . . . . . . . . . Rate, Deviation (Rate %), Power (%), Sensors
(Rate)
Readouts . . . . . . . . . . . . . . . Rate Å/s, Dev (%), Thickness kÅ, Power (%),
Frequency (MHz), Life (%), Process name, Film
name, Layer number, Phase, Process Time,
Layer Time, Phase Time
1.3.2 Process Parameters
Processes. . . . . . . . . . . . . . . Unlimited number of processes
Process Name . . . . . . . . . . . 15 characters maximum
Sensors . . . . . . . . . . . . . . . . IQM-233: 1 to 6 (1 to 3 Dual)
SQM-242: 1 to 8 (1 to 4 Dual)
Outputs . . . . . . . . . . . . . . . . . IQM-233: 1 to 6
SQM-242: 1 to 4
Layers. . . . . . . . . . . . . . . . . . Unlimited number of layers
Film. . . . . . . . . . . . . . . . . . . . Any defined film
Outputs . . . . . . . . . . . . . . . . . IQM-233: 1 to 6
SQM-242: 1 to 4