INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 34)

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IQS-233 Operating Manual
2.3.3.1.5 Log Data
Click File >> Log Data to display the DataLog window where data log preferences
can be configured and saved to a .csv format data log file (see
Figure 2-12 ).
Figure 2-12 DataLog window
When data logging is activated, data is recorded for the following parameters:
 Process Name
 Run Number
 Date Time
 Event
 Layer
 Process Time
 Layer Time
 Deposit Time
 Output Number
 Film
 Thickness
 Rate
 Rate Deviation
 Power
 Sensor Number
 Sensor Rate
 Sensor Thickness
 Frequency
NOTE: The parameters recorded in the data log file depend on the parameter
selections in the Events to Log pane of the DataLog window.