INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Log File pane

None . . . . . . . . . . . . . . . . . . . . . . . . Data logging is unavailable.

Filename . . . . . . . . . . . . . . . . . . . . . Displays the name of the file to which

process data will be saved.

Overwrite. . . . . . . . . . . . . . . . . . . . . Each process run is saved to the file name

displayed in the Filename box.

NOTE: Subsequent process runs will

overwrite previous data in this file.

Append . . . . . . . . . . . . . . . . . . . . . . Data logged for the current process run is

added on to the end of any previously logged
data in the file displayed in the Filename box.

Run # . . . . . . . . . . . . . . . . . . . . . . . . Each process run is saved as a separate file

with the format filename_#.csv, where # is a
number that increments with each new run.

Save As . . . . . . . . . . . . . . . . . . . . . . Displays the Save As window, where process

data can be saved as a .csv format file. The
name of this file will be displayed in the
Filename box.

View . . . . . . . . . . . . . . . . . . . . . . . . . Displays the default Log folder where data

log files are stored. Click a data log file to
display a preview of the file contents or
double-click the file to open it in Microsoft®
Excel

®

.

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