INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Setpoint % Pwr . . . . . . . . . . 0.00 to 100.00%

Setpoint % Pwr is displayed instead of Setpoint (Å/s)
when Timed Power is selected in the Input box of the
Layer tab. Setpoint % Pwr is the value of constant
Output Power used until the next Rate Ramp is
initiated or Final Thickness is reached. This value is
equal to a percentage of the full scale source Output
voltage.

Insert Ramp . . . . . . . . . . . . Inserts a new rate ramp configuration for the

selected Layer, at the selected position in the rate
ramps list. Existing rate ramps are shifted downward.

Delete Ramp . . . . . . . . . . . . Deletes the selected rate ramp.

Move Up . . . . . . . . . . . . . . . Shifts the selected rate ramp up one position.

Move Down . . . . . . . . . . . . Shifts the selected rate ramp down one position.

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