INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 51)

2 - 31
IP
N 07
4-
58
5-
P1
A
IQS-233 Operating Manual
2.3.3.5.8 Deposit Tab
PID loop control, Shutter Delay, and Rate Sampling are configured in the Deposit
tab. See
Figure 2-29 .
Figure 2-29 Film Edit window - Deposit tab
Loop pane
P Term . . . . . . . . . . . . . . . . . 0 to 9999
P is the proportional term that sets the gain of the
control loop. A value of 0 makes this command
unavailable. Enter a higher gain for a faster
responding (but potentially unstable) control loop,
and a lower gain for a slower responding control
loop. Enter a value of 25, and then gradually
increase or decrease the value to respond as
desired to rate step changes.
I Term (sec) . . . . . . . . . . . . . 0.0 to 999.9 s
I is the integral term that controls the time constant
of the loop. A value of 0 makes this command
unavailable. Enter a small I Term, such as 0.5 to 1
second, to smooth the response and minimize
overshoot to rate step changes.