INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
D Term (sec) . . . . . . . . . . . . 0.00 to 99.90 s
D is the derivative term that determines how quickly
the control loop responds to changes. A value of 0
makes this command unavailable. Enter 0 or a very
small value to avoid rate oscillations, especially with
fast sources, such as electron beam guns. Slow
sources, such as resistively heated sources, may
require a large D value.
NOTE: For detailed information about determining the PID values, see
Tuning the Control Loop, on page 4-5
Shutter Delay pane
Shutter Delay allows a stable rate to be achieved before the source shutter opens
exposing the substrate to the deposition source.
Enabled . . . . . . . . . . . . . . . . Select the check box to active Shutter Delay.
Accuracy (%) . . . . . . . . . . . 0.0 to 30.0 %
A percentage of the desired deposition rate that
must be reached within a specified time period (Wait)
and not exceeded for a specified time period (Hold).
If the Accuracy (%) value is not achieved within the
Wait time, or is exceeded before the Hold time
elapses, the layer is halted and the message Failed
to reach and hold n% control during shutter delay
time on (name) film is displayed.
Wait (sec) . . . . . . . . . . . . . . 0.00 to 30000.00 s
Maximum time allowed to achieve the Accuracy (%)
value.
Hold (sec) . . . . . . . . . . . . . . 0.00 to 30000.00 s
Time period that must elapse without the percentage
of desired rate being exceeded.
Rate Sampling pane
Rate sampling can extend the life of crystals. With rate sampling, the deposition
rate is sampled by a sensor during the Sample time and the average Output Power
required to maintain the rate during the Sample time is determined. The sensor
shutter is then closed and the Output Power is held at a constant value during the
Hold time. When the Hold time elapses, the sensor shutter is opened and the
deposition rate is sampled again. This sample and hold cycle continues until the
desired Final Thickness value is reached.
Continuous . . . . . . . . . . . . . Rate Sampling is unavailable and the sensor shutter
remains open during deposition.