INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual - Manual (Page 54)

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IQS-233 Operating Manual
2.3.3.5.9 Condition Tab
Preconditioning and postconditioning phases are configured in the Condition tab.
See
Figure 2-30 .
Figure 2-30 Film Edit window - Condition tab
Pre Condition pane
Before the deposition phase starts, it is often necessary to precondition the source
material, especially when using a thermal source. At the end of the precondition
phase, the power level should be at or near the power required for deposition.
Ramp 1 Power (%) . . . . . . . 0.00 to 100.00%
The output Power at the end of the Ramp 1 Time
phase. This value is a percentage of the full scale
output (Full Scale Out) selected in the Outputs tab of
the System Setup window.
Ramp 1 Time (sec) . . . . . . . 0.00 to 30000 s
The length of time to change the output power from
the initial power level to the Ramp 1 Power level.
Soak 1 Time (sec) . . . . . . . . 0.00 to 30000 s
The length of time the output Power remains at the
Ramp Power level.
Ramp 2 Power (%) . . . . . . . 0.00 to 100.00%
Same command as Ramp 1 Power. Typically, the
Ramp 2 Power value is set to approximately the
power level required to achieve the desired initial
deposition rate.