INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual

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IQS-233 Operating Manual

Ramp 2 Time (sec) . . . . . . . 0.00 to 30000 s

Same command as Ramp 1 Time.

Soak 2 Time (sec) . . . . . . . . 0.00 to 30000 s

Same command as Soak 1 Time.

Auto Soak 2 . . . . . . . . . . . . When the check box is selected, a power value

based on the power level used during the deposition
phase is used for the Ramp 2 Power value during the
next run of the selected Layer.

Post Condition pane

Feed parameters are used with systems that provide wire-fed material to the
source. The Feed phase starts immediately after the deposition phase ends. If the
Feed parameters are at 0, the Feed phase is skipped and the Idle phase starts.

Feed Power (%). . . . . . . . . . 0.00 to 100.0%

The Power level reached at the end of the Ramp
Time. This value is a percentage of the full scale
output (Full Scale Out) selected in the Outputs tab on
the System Setup window.

Ramp Time (sec). . . . . . . . . 0.00 to 30000 s

The amount of time required to reach the Feed
Power level after the deposition phase ends.

Feed Time (sec) . . . . . . . . . 0.00 to 30000 s

The time that Output Power stays at the Feed Power
value before the Idle phase starts.

The Idle phase follows the Feed phase. If the Feed
parameters are at 0, the Feed phase is skipped and
the Idle phase starts immediately after the deposition
phase ends.

Idle Power (%). . . . . . . . . . . 0.00 to 100.0%

The Power level reached at the end of the Ramp
Time. This value is a percentage of the full scale
output (Full Scale Out) selected in the Outputs tab of
the System Setup window.

Ramp Time (sec). . . . . . . . . 0.00 to 30000 s

The time required to reach the Idle Power level after
the Feed phase ends (or the Deposition phase ends,
if Feed parameters are at 0).

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