INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Codeposition Software Operating Manual User Manual
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IQS-233 Operating Manual
Figure 2-52 IQS-233 Codeposition window - frequently used Layer parameters for manual control
Frequently Used Parameters—Auto Mode
Ramp 1 Power . . . . . . . . . . . . . . . . 0 to 100%
Ramp 1 Time . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Soak 1 Time . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Ramp 2 Power . . . . . . . . . . . . . . . . 0 to 100.00%
Ramp 2 Time . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Soak 2 Time . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Shutter Acc . . . . . . . . . . . . . . . . . . . 0.0 to 30.0%
Shutter Wait . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Shutter Hold . . . . . . . . . . . . . . . . . . 0 to 30000 sec
Final Thickness . . . . . . . . . . . . . . . 0.000 to 999.900 kÅ
Rate . . . . . . . . . . . . . . . . . . . . . . . . . -999.90 to 999.90 Å/s
Thick End Pt . . . . . . . . . . . . . . . . . . 0.000 to 999.900 kÅ
Time End Pt. . . . . . . . . . . . . . . . . . . 0 to 3000 sec
P Term . . . . . . . . . . . . . . . . . . . . . . . 0 to 9999