Ocean Optics PlasCalc - Manual (Page 56)

Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 53
If a correlation of the monitor signals and the endpoint is not directly seen, you may
improve your monitor recipe by following one or more of the steps given below:
1. Create monitor tracks which are related (divided) to the monitor signal of the
background gas (preferable a noble gas) using the menu command Monitoring |
Add combined monitor track:
2.
3. Create a monitor tracks which is Combining (dividing) monitor signals with different
dependencies across the endpoint to improve the signal/noise ratio.
4. Create a monitor track with the derivative of a monitor signal if the temporal
evolution is changing across the endpoint:
Important: After you have successfully determined appropriate monitor signals for
detecting the endpoint, make sure that you save your settings in a monitor recipe using the
menu command Monitoring | Save monitor recipe!