Brooks Instrument SolidSense II - Manual (Page 19)

Installation and Operation Manual
X-PR-SolidSense II-PT-eng
Part Number 541B160AAG
July, 2011
SolidSense II ® Series
2-3
Section 2 Installation
2-7 Mechanical Connections
Failure to follow these procedures may adversely affect the product’s
performance and could void the product warranty. Inspect, but DO NOT
unwrap any parts until installation. Contact your Brooks representative with
any problems.
1. The SolidSense II pressure transducer is double-bagged for cleanroom
service and should remain packaged until installation. DO NOT remove the
pressure transducer from the protective bag unless you are in a clean
environment.
a. Remove the pressure transducer from the box and carry it into the
gray area.
b. Remove te outer protective bag and discard.
c. Carry the pressure transducer (sealed in inner bag) into the clean
room.
2. Install the SolidSense II pressure transducer.
a. Prepare the connection fitting in place on the gas line. Any other fitting
components, such as stainless steel gaskets, should be blown clean with
filtered gas before use.
b. Maintain a flow of at least 1 slpm (0.05 scfm) of inert gas during
installation to minimize tubing and pressure transducer contamination
from environ-mental moisture and particles. The recommended purge
gas is electronic-grade Nitrogen.
c. Open the inner bag and remove the pressure transducer. Remove any
fitting protection caps and seat the pressure transducer on the mating
connections.
d. For connections compatible with VCR ® fittings: Tighten by hand. Then
turn the fitting 1/8 turn past finger-tight using a wrench.
3. Prepare the SolidSense II pressure transducer for use.
a. Verify integrity of the seal by appropriate helium leak-testing
procedures.