Brooks Instrument GF81 User Manual

Brooks, Capable digital thermal mass flow devices

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Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013

Brooks

®

GF40/GF80/GF81 Series

MultiFlo

TM

Capable Digital Thermal Mass

Flow Devices

Brooks

®

GF40/GF80/GF81 Series available with RS485, DeviceNet

TM

, Profibus

®

or EtherCAT

®

I/O

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This manual is related to the following products:

GF80, GF40

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