Brooks Instrument Mfi Series - Manual

Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Brooks ® Mf Series
NEMA 4X and IP66 Mass Flow Controllers and Meters
Mfi Series
Controllers: Mf50i, Mf51i and Mf53i
Meters: Mf60i, Mf61i and Mf63i
Mfx Series
Controllers: Mf50x, Mf51x and Mf53x
Meters: Mf60x, Mf61x and Mf63x
Mf50
Mass Flow Controller
Mf61
Mass Flowmeter