APTech AP3708 - Manual (Page 2)

Operation Manual Pneumatic Diaphragm Valves (NO)
Manual 15000007 Rev 3 Page 2 of 2
3. Install the valve using the appropriate method described below.
a. For tube stub connections, weld connectors or other components to the tube stubs per
standard industry practice (reference SEMI standard F78).
b. For metal face seal connectors, assemble connections per standard practice described by
fitting supplier (typically 1/8 turn past fingertight).
c. For compression-type connectors, insert the tube into the fitting until it stops. Tighten the
fitting by applying 1-1/4 turns of nut rotation.
a) For reinstallation, mark the nut and the valve body before disassembly.
This will allow the nut to be returned to the original assembly position.
Insert the tube and attached ferrules into the fitting until fully seated.
Rotate the nut until it is returned to the original assembly position, and
tighten slightly beyond marked position.
d. Most valves can be attached to panels or mounting plates using the 10-32 or M5 female
thread mounting holes located in the bottom of the body (valves with M5 mounting holes
will be marked with a “5” on the bottom of the body). Special configurations or multi-valve
blocks may not have mounting holes or may have different size holes. Refer to the specific
data sheet or Technical Bulletin for detailed mounting information.
4. Connect a nitrogen or clean dry air actuation pressure supply to the valve actuator
connection. The connection may be a 1/8 NPT female thread, 10-32 female thread, or an
M5 female thread depending on the valve model.
5. After installation, perform a leak test of all connections and welds per standard industry
practice (reference SEMI standard F1).
C. Operation
1. Perform the following to close the valve.
a. Apply actuation pressure to the valve.
2. Perform the following to open the valve.
a. Vent the valve actuation pressure to atmospheric pressure.
3. When a valve is in the closed position, the inlet ports are isolated from the outlet ports.
When a valve is in the open position, all ports are common.
Please contact the factory or your local representative to answer questions or for further
information.