APTech AP72 - Manual (Page 2)

Operation Manual Vacuum Generators
c. Identify the gas delivery system vent line to be connected to the vacuum generator
vacuum port.
3. Install the vacuum generator to the system connections using the appropriate method
described below.
a. For tube stub connections, weld connectors or other components to the tube stubs per
standard industry practice (reference SEMI standard F78).
b. For metal face seal connectors, assemble connections per standard practice described by
fitting supplier (typically 1/8 turn past finger-tight).
4. For the AP71 and pneumatically actuated AP72 models, connect a nitrogen or clean dry air
actuation pressure source of appropriate pressure to the actuation port.
a. AP71 and AP72550 models have a 10-32 female thread actuation port on the side.
b. AP72540 models have a 1/8 inch NPT actuation port on the top of the valve actuator.
5. After installation, perform a helium leak test of all face seal connections and welds per
standard industry practice (reference SEMI standard F1).
6. For AP7 and AP70 vacuum generators, a check valve is recommended between the vacuum
generator “IN” port and nitrogen supply. The check valve is best positioned on the inlet side
of the N2 supply valve.
C. Operation: All Vacuum Generators
NOTE: Consult appropriate safety standards for safe dilution guidelines.
1. Initiate vacuum generator N2 flow prior to venting process gas.
2. Venting process gas at high pressure is not recommended as a standard procedure.
3. Venting process gas at a pressure higher than vacuum generator N2 supply pressure may
close the vacuum generator check valve. No dilution of process gas or vacuum will be
generated when the check valve is closed.
4. Venting process gas through the vacuum generator will impact generated vacuum level and
process gas dilution. The level of impact depends on the vented system volume and initial
process gas pressure.
D. Operation of AP7 and AP70
1. To generate a vacuum using the AP7 and AP70, apply nitrogen pressure to the inlet port.
2. . When sufficient nitrogen pressure is supplied to the inlet port, a vacuum will be generated
at the vacuum port.
3. To shut-off the vacuum, shut-off the nitrogen supply to the inlet port.
E. Operation of AP71 and AP72
1. Perform the following to generate a vacuum using the AP71 and AP72.
a. Apply nitrogen pressure to the inlet port.
b. Open the shut-off valve to allow flow through the vacuum venturi.
Manual 15000003 Rev 2 Page 2 of 3