Figure c.2: firmware rom label, Operation, Installation – INFICON STM-100/MF Thin Film Deposition Monitor User Manual

Page 98: Figure c.3: shmx-4 back panel, Films sensor

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Sycon 520-001

STM100 VI6

Figure C.2: Firmware ROM Label

To access the individual sensors use the multiple film capability of the

STM-100 / MF. Selecting film 1 from the front panel, or by external computer
control, will select sensor 1. By selecting different films the active sensor will
change according to the following table.

Films

Sensor

1, 5, 9

1

2, 6

2

3, 7

3

4, 8

4

Sensor and Controller connections to the SHMX-4 are made on the back

panel, shown below.

240VAC FUSE 1/8 AMP SB

120VAC FUSE 1/4 AMP SB

4 Sensor Head Multiplexer

SHMX-4

POWER

instruments

S4

S3

S2

S1

Control

Unit

GND

CHANNEL

SELECT

RELAY

OUTPUT

Figure C.3: SHMX-4 Back Panel

The BNC connectors labeled S1 through S4 are the individual Crystal

sensor connections. The connection to the controlling STM-100 is made via 2
connection cables. The first is the control cable which goes between the
Channel Select 9 Pin D connector on the SHMX-4 to the Input / Output 15 Pin
D connector on the STM-100. The control cable is shown below. The Sensor
BNC on the STM-100 and the SHMX's Control Unit BNC are connected.

Operation

Installation

SHMX-4 Operation

Page C - 2

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