INFICON STC-2002 Thin Film Deposition Controller Operating Manual - Manual (Page 129)

p STC-2002 DEPOSITION CONTROLLER y
SECTION 3.XX e page 127 of 276 ^
quite obviously, are not runable. Starting such a process will result in an error indicating an ERROR IN
RECIPE. Prior to activating an automatic deposition sequence the user must insure that the particular user
defined process recipe has been selected as the ‘ACTIVE PROCESS’. The current or active process
number (1 through 9) is displayed in the middle left hand area of the runtime screen (see figures 2.2, 2.4,
2.13), following the label: 'PROC’.
The current layer number, if any, is displayed as well as the status of the process (i.e. PROCESS
VERIFY, PROCESS STOP, PROCESS RESETING, PROCESS BUSY, PROCESS WAITING or
ERROR). The active process can be changed providing the status is displayed as LAYER # rather than
LAYER NN where NN is 1 through 99. The # is equivalent to a zero and indicates an illegitimate run
value.
To change the active process (only allowed when the instrument is in IDLE and the LAYER value
is "#" indicating an at rest condition [observe the runtime screen]), press the fixed MENU key, which will
produce the MAIN menu screen as shown in figure 2.5. Next, press the digit key area that is labeled on the
MAIN menu as the ‘ACTIVE PROCESS’ selection. Only the numeric digit is an active key. The box
with the text ‘ACTIVE PROCESS’ is only a label for the numeric digit (see figure 2.12). Pressing the
numeric digit key increments the value with each press such that ‘1’ through ‘9’ can be entered to select the
active process. Press the fixed STATUS key to return to the Run Time screen. If an attempt to change the
active process is made with the instrument in a non-idle condition, a temporary error message will appear
saying ; “INHIBITED: UNIT MUST BE IDLED”. When the text "NA" appears on the digit key, the
product is not allowing the alteration because it would not be desirable to change the process while it is
running. The process must be stopped. See START: Reset/Start Process diagram below. See section 2.19.