Figure 5-2, If re – INFICON Front Load Single Sensor User Manual
Page 81
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5 - 5
PN
07
4-
15
6N
Front Load Single and Dual Sensors Operating Manual
Figure 5-2 Sensor head isolation check
7
Disconnect the in-vacuum cable from the feedthrough.
8
Measure resistance between center contact and shield of the BNC.
If resistance is less than 10 MΩ, continue to step 8a.
If resistance is more than 10 MΩ, continue to step 9.
8a
Examine the feedthrough for the cause of the low resistance. Contact INFICON
if cause of low resistance is not found (refer to
9
Replace the in-vacuum cable.
10
Measure resistance between center contact and shield of the BNC.
If resistance is more than 10 MΩ, electrical isolation is good. Go to
5.1.2.2, Electrical Continuity Check, on page 5-6
.
If resistance is less than 10 MΩ, contact INFICON.
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