INFICON SQC-310 Thin Film Deposition Controller User Manual
Sqc-310, Thin film deposition controller
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Quick Start
- Chapter 2 Operation
- Chapter 3 Menus
- Chapter 4 Maintenance & Accessories
- Chapter 5 Communications
- 5.1 Introduction
- 5.2 SQC-310 Comm.exe
- 5.3 SQC-310 Commands
- 5.3.1 Get Model
- 5.3.2 Get/Set Film Parameters
- 5.3.3 Get/Set System Parameters
- 5.3.4 Get/Set Process Parameters
- 5.3.5 Get/Set Layer Parameters
- 5.3.6 Delete All Layers
- 5.3.7 Get/Set Material Parameters
- 5.3.8 Get/Set Input & Relay Parameters
- 5.3.9 Get/Set Sensor, Source, Relay Parameters
- 5.3.10 Get/Set Logic Statement Parameters
- 5.3.11 Get Num Channels
- 5.3.12 Get Readings
- 5.3.13 Get Sensor Rate
- 5.3.14 Get Output Rate
- 5.3.15 Get Sensor Thickness
- 5.3.16 Get Output Thickness
- 5.3.17 Get Sensor Frequency/Crystal Life
- 5.3.18 Get Output Deviation
- 5.3.19 Get/Set Output Power
- 5.3.20 Set Active Process
- 5.3.21 Set Run State
- 5.3.22 Get Run State
- 5.3.23 Start Download/Upload Session
- 5.3.24 Stop Download/Upload Session
- 5.4 CRC Examples
- Appendix A Material Table
- Appendix B Specifications
- Appendix C I/O Connections