INFICON MDC-260 Thin Film Deposition Controller - Manual (Page 205)

MDC-260 DEPOSITION CONTROLLER
INDEX
states, 5-7
status displays, 5-3
substrate heat control, 4-10
T
theory of operation, 10-1, 11-1
basic measurement, 10-1
crystal health calculation, 10-3
film thickness calculation, 10-1
rate calculation, 10-6
thickness overshoot, 4-12
time parameters, entering, 4-2
trouble, error and warning messages, 5-7
U
utility setup, 4-4
V
voltage selection, 8-2