INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge - Manual

TripleGauge™
Bayard-Alpert Pirani Capacitance Diaphragm Gauge
BCG450
BCG450-SD
BCG450-SP
Instruction Sheet
Incl. EC Declaration of Conformity
tima40e1-b (2011-04)
Product Identification
In all communications with INFICON, please specify the in-
formation given on the product nameplate. For convenient
reference copy that information into the space provided
below.
Model:
PN:
SN:
V W
INFICON AG, LI-9496 Balzers
Validity
This document applies to products with the following part
numbers (PN):
BCG450 ( without display)
353-550 (DN 25 ISO-KF)
353-551 (DN 40 CF-R)
353-561 (DN 25 ISO-KF, with baffle)
BCG450 (with display)
353-552 (DN 25 ISO-KF)
353-553 (DN 40 CF-R)
BCG450-SD (with DeviceNet interface and switching functions)
353-557 (DN 25 ISO-KF)
353-558 (DN 40 CF-R)
353-562 (DN 25 ISO-KF, with baffle)
BCG450-SP (with Profibus interface and switching functions)
353-554 (DN 25 ISO-KF)
353-556 (DN 40 CF-R)
The part number (PN) can be taken from the product name
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the gauge with part number
353-550. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The BCG450, BCG450-SD and BCG450-SP gauges have
been designed for vacuum measurement of gases in the
pressure range 5×10
-10 … 1500 mbar.
They must not be used for measuring flammable or combus-
tible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
Trademarks
DeviceNet™ Open DeviceNet Vendor Association, Inc.
TripleGauge™ INFICON AG, Balzers
Functional Principle
Due to the combination of three sensor technologies incorpo-
rated in the gauge (Capacitance diaphragm sensor, Pirani
sensor and hot cathode ionisation sensor (BA)), a minimized
gas type dependence is achieved.
Between 10 mbar and atmospheric pressure, the capaci-
tance diaphragm sensor operates without any gas type
dependence. Below 1 mbar, the Pirani sensor and the hot
cathode ionisation sensor take over with only a small gas
type dependence.
Between 1 … 10 mbar and 5Ч10
-3 … 2Ч10 -2 mbar the gauges
built in electronic circuits take care of continuous and smooth
crossovers between the ranges. Over the whole measure-
ment range, the measurement signal is output as a logarithm
of the pressure.
The hot cathode is switched on by the Pirani measurement
system only below the switching threshold of 2.4×10
-2 mbar
(to prevent filament burn-out). It is switched off when the
pressure exceeds 3.2×10
-2 mbar.
Gauge adjustment is carried out automatically, no manual
adjustment is required.
A user programmable atmospheric pressure switching
function is incorporated.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and
environmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and
the necessary experience or who have been instructed by
the end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the ne-
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the
process media due to the heat generated by the product.
• Adhere to the applicable regulations and take the ne-
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (e.g. filament), are not covered by
the warranty.
Technical Data
In some points, the technical data of BCG450-SD
and BCG450-SP differ from those of BCG450,
which are given below (
→ "Technical Data" in [1]
and [2]).
Measuring principle
10 … 1500 mbar capacitance diaphragm
sensor
1 … 10 mbar crossover range
2×10 -2 … 1 mbar Pirani sensor
5Ч10 -3 … 2Ч10 -2 mbar crossover range
5Ч10 -10 … 5Ч10 -3 mbar hot cathode ionization (BA)
Measuring range
(air, O
2
, CO, N
2
)
5×10 -10 … 1500 mbar
continuous
Accuracy
1×10 -8 … 50 mbar ±15% of reading
50 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading
(after 10 min. stabilization)
Repeatability
(1×10 -8 … 10 -2 mbar)
5% of reading
(after 10 min. stabilization)
Emission
Switching on threshold
Switching off threshold
2.4×10
-2 mbar
3.2×10 -2 mbar
Emission current
p ≤7.2×10 -6 mbar
7.2×10 -6 mbar < p
<3.2×10 -2 mbar
5 mA
25 µA
Emission current switching
25 µA ⇒ 5 mA
5 mA ⇒ 25 µA
7.2×10
-6 mbar
3.0×10 -5 mbar
Degas
Current (p <7.2×10 -6 mbar)
≈20 mA (P
degas
≈4.0 W)
Control input signal 0 V/+24 V, active high
Duration <3 min, followed by auto-
matic stop. A new degas
cycle can only be started
after a waiting time of 30
minutes.
In degas mode, the BCG450 keeps supplying pressure
readings, the tolerances of which can be higher than dur-
ing normal operation.
Output signal
(measuring signal)
0 … +10.13 V
Measuring range 0.774 … 10.13 V
(5×10
-10 … 1500 mbar)
Relationship voltage-pressure logarithmic,
0.75 V/decade
Error signal ( → [1]) +0.1 V
+0.3 V
+0.5 V diaphragm sensor
error or EEPROM
error
BA sensor error
Pirani sensor error
Minimum load impedance 10 k Ω
Gauge identification 42 k Ω between Pin 10 and
Pin 5 (gauge cable con-
nector)