Bird Technologies 8931-230SC13-Datasheet - Manual

Oil Dielectic
SC13 Series
Ultra-Stable, Oil-Dielectric RF Termination Loads
For maximum process repeatability and consistency, modern plasma applications require precise RF
power regulation and control. A key component in ensuring accurate & repeatable RF power delivery
to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low
VSWR loads for quick and precise measurement of generator power output when used with precision
power sensors such as the Bird 4020 series. Bird® models 8865SC13, 8890-300SC13, 8921SC13 and
8931 SC models not only provide low VSWR but also less than 0.1 dB total change in VSWR at process-
critical frequencies. There is no need for load warm-up or risk of repeatability due to calibration for
different lengths of time. This can minimize the errors associated with this calibration and control
one of the more critical process variables.
RF Broadcast Load
SC Series
0 250 500 750
0.2
0.15
0.1
0.05
0
Input Power (W)
Absolute VSWR Change (dB)
RF Generator 4027A10M
Sensor
SC Precision
Load
Typical RF generator calibration set-up with precision power sen
Load.
Load_Oil_SC13Series_2012 branding 6/7/2013 1:41 PM Page 1