Bird Technologies BDS-Datasheet - Manual

The Bird Diagnostic System (BDS) is a revolutionary tool for measuring voltage and current in complex
applications. Where repeatability of sensitive RF measurements is important, such as during the processing
of silicon wafers, the BDS provides never-before seen data. Each system is comprised of a sensor that
attaches in-situ in the RF feed line, a receiver that performs the data conversion and communicates to your
workstation, and a calibrated data cable that connects the sensor and receiver.
Using a streamlined architecture, the BDS is able to measure and report voltage, current, and phase angle
at multiple fundamental, harmonic and intermodulation frequencies. With this data, power and impedance
are calculated at each frequency, giving users the ability to identify small discrepancies that may make the
difference between a successful and a failed process. This makes the BDS an incredible tool for researching
new RF technologies and repeating high precision processes.
System
PROBLEMS } SOLUTIONS
Simultaneous Measurements of Multiple RF Generators
} Up to 5 fundamental frequencies can be measured
simultaneously with a single BDS system. This feature aids in
developing repeatable processes, troubleshooting
components and identifying process drifts.
Complex Waveform Plot
} Up to 5 fundamental frequencies can be measured
simultaneously with a single BDS system. This feature aids in
developing repeatable processes, troubleshooting
components and identifying process drifts.
APPLICATIONS
Chamber to Chamber Matching.
Waveform Reconstruction enables chamber comparisons to
identify large and small changes.
Impedance Matching can reveal problems such as poor RF
connections, worn electrodes and changes in the process gas
mixture.
Harmonic Levels up to 150 MHz are available for analysis.
V, I, Phase and Delivered Power Comparison.
BDS Series_SignalHawk Sell Sheet 11/14/2013 10:13 AM Page 1