Bronkhorst Vapor Delivery Module - Manual (Page 4)

Bronkhorst®
Vapor Delivery Module 9.17.079 4
Table of contents
...................................................................................................................................................................... 6 Scope of this manual 1
...................................................................................................................................................................... 6 1.1 Introduction and intended use
...................................................................................................................................................................... 6 1.2 References to other applicable documents
...................................................................................................................................................................... 6 Related documents 1.2.1
...................................................................................................................................................................... 6 Software tooling 1.2.2
...................................................................................................................................................................... 7 Starting up 2
...................................................................................................................................................................... 7 2.1 Check properties
...................................................................................................................................................................... 7 2.2 Rated pressure test inspection
...................................................................................................................................................................... 7 2.3 Install module
...................................................................................................................................................................... 7 2.4 Model key
...................................................................................................................................................................... 8 Technical specification 3
...................................................................................................................................................................... 8 3.1 Physical dimensions
...................................................................................................................................................................... 8 3.2 Environmental conditions
...................................................................................................................................................................... 8 3.3 Ingress protection class
...................................................................................................................................................................... 8 3.4 Fluidic connections
...................................................................................................................................................................... 8 General 3.4.1
...................................................................................................................................................................... 8 Flow ranges of used components 3.4.2
...................................................................................................................................................................... 9 Capacities 3.4.3
...................................................................................................................................................................... 9 Pressure rating 3.4.4
...................................................................................................................................................................... 9 3.5 Piping
...................................................................................................................................................................... 9 3.6 Electrical connections
...................................................................................................................................................................... 9 Mains 3.6.1
...................................................................................................................................................................... 10 Tracing 3.6.2
...................................................................................................................................................................... 10 Pt100 tracing sensor 3.6.3
...................................................................................................................................................................... 10 Communication 3.6.4
....................................................................................................................................................................... 10 RS232 / Propar 3.6.4.1
....................................................................................................................................................................... 10 FLOW-BUS 3.6.4.2
...................................................................................................................................................................... 11 3.7 Connector specifications
...................................................................................................................................................................... 11 Hook-up diagram 3.7.1
...................................................................................................................................................................... 12 Installation 4
...................................................................................................................................................................... 12 4.1 Mounting
...................................................................................................................................................................... 12 4.2 Fluid connections
...................................................................................................................................................................... 12 4.3 Supply pressure
...................................................................................................................................................................... 12 4.4 Leak check
...................................................................................................................................................................... 12 4.5 Seals
...................................................................................................................................................................... 13 4.6 Purging / filling
...................................................................................................................................................................... 13 Startup without using vacuum 4.6.1
....................................................................................................................................................................... 13 To fill the system 4.6.1.1
....................................................................................................................................................................... 14 To start the process 4.6.1.2
....................................................................................................................................................................... 14 To stop the process 4.6.1.3
....................................................................................................................................................................... 14 How to leave system overnight 4.6.1.4
....................................................................................................................................................................... 14 To empty and purge the system 4.6.1.5
...................................................................................................................................................................... 15 Startup with using vacuum 4.6.2
....................................................................................................................................................................... 15 To fill the system 4.6.2.1
....................................................................................................................................................................... 15 To start the process 4.6.2.2