Online cleaning instructions – Cascade Microtech P800-S User Manual
Page 3
PN 151-853-A
www.cascademicrotech.com
Pyramid Probe Card: P800-S Online Cleaning• 3
Table 1. Recommended, acceptable and unacceptable online cleaning materials and methods.
Recommended
Abrasive
Coated
Foams
The most common source for abrasive coated foams is MIPOX International. Abrasive-
coated foams consist of a layer of abrasive particles in a resin binder. Instead of being
bonded to a polyester film carrier like a lapping film, the particles are coated onto a soft,
open-celled foam. These films are typically 450-500 µm thick. Abrasive-coated foams are
the only recommended cleaning media for P800-S type Pyramid Probes.
Figure 4. Abrasive coated foam architecture.
MIPOX International Corporation offers probe card cleaning sheets with foam backing
materials in a variety of abrasives and grit sizes. Contact MIPOX directly for application-
specific recommendations and product suppo
MIPOX International’s WA6000-SWE is used in the factory for cleaning P800-S Pyramid
Probes. Sheets of 9 x 11 inch MIPOW WA6000-SWE are available directly from MIPOX (p/
n WA6000-SWE FWX w/PSA).
Acceptable
Abrasive
Loaded
Elastomers
Abrasive-loaded elastomer media consist of a relatively thick layer of elastomer [such as
silicone, polyurethane, or rubber) with abrasive particles mixed evenly throughout the
polymer. This gel-like film is generally mounted to a polyester backing film or a cleaning
wafer. The most common source of this type of cleaning film is International Test Solutions
(ITS). Abrasive-loaded elastomers are expected to be safe for use.
(Drawing courtesy of MIPOX)
T
hickness appr
ox.
450 µm
Resin
Abrasive
PET Film
Polyurethane
Adhesive
Online Cleaning Instructions