Brooks Instrument SLA5840 - Manual (Page 36)

4-14
Brooks ® Model SLA5840
Section 4 Maintenance
& Troubleshooting Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
Figure 4-3 Example Nomograph.
Orifice Size (inches) Minimum Flow Rate (sccm)
(0°C) (21.1°C)
0.0013 5.3 (5.7)
0.002 12.5 (13.5)
0.003 39.2 (42.2)
0.004 82.5 (88.9)
0.0055 190 (205)
0.007 374 (403)
0.010 748 (806)
0.014 1364 (1469)
0.020 2673 (2879)
0.032 6490 (6991)
0.048 12980 (13980)
0.062 22000 (2879)
0.078 31900 (34400)
0.093 42500 (45800)
0.120 69300 (74700)
Inlet Pressure = 10 psig
Outlet Pressure = 10 inches of water (0.4 psig) or less
Note: Flow Rate based on Nitrogen
Table 4-2 Orifice Capacities