Brooks Instrument 5866M - Manual (Page 64)

3
Addendum
April 5, 2004
Attach to the following publications:
X-5850EM, December 1998, Issue 3
X-5964, dated April 1996, Issue 2
X-5866, dated April 1998, Issue 2
X-5866RT, dated May 1998, Issue 2
Brooks ® TMF Common Body Dimensions
Figure A-2 Typical Downport MFC/MFM Dimensional Drawing Fittings for Models 5850EMF, 5964D, 5866 and 5866RT.