Brooks Instrument 5850EM - Manual (Page 18)

2-4
Brooks ® Models 5964, 5850EM
Section 2 Installation Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.
CAUTION
e. The control valve in the Model 5964/5850EM provides precision
control and is not designed for positive shut-off. If positive shut-off is
required, it is recommended that a separate shut-off valve be
installed in-line.
2-9 Electrical Interface