Brooks – Brooks Instrument 5851EM User Manual

Page 13

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1-7

Brooks

®

Models 5965, 5851EM

Section 1 Introduction

Installation and Operation Manual

X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Figure 1-3 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or Card Edge, Downported

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