Brooks, Model 5860e – Brooks Instrument 5860E User Manual
Page 35
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5-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 5 Parts List
5-1 General
When ordering parts, please specify:
Brooks Serial Number
Model Number
Part Description
Part Number
Quantity
(Refer to Figure 5-1 and Tables 5-1 and 5-2).
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