Brooks Instrument 5860i - Manual (Page 8)

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Brooks ® Model 5860 i
Section 1 Introduction Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Standard Ranges
Any full scale flowrate from 3 sccm to 30 slpm* (Nitrogen equivalent)
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0° C and
101.3 kPa (760 Torr).
Accuracy
±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability
0.25% of rate
Response Time (Flow Output Signal)
Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% flow step.
Power Requirements
+15 to +28 Vdc @ 90 mA
Figure 1-1 Typical Response to Flow Step Changes