Brooks Instrument 5851i - Manual (Page 10)

1-4
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks ® Model 5851 i
Section 1 Introduction
Leak Integrity
1 x 10
-9 Atm. scc/sec Helium
Control Range
50 to 1
Mechanical Connection
Interchangeable with most popular mass flow controllers.
Refer to Figure 2-1.
Electrical Connection
D-Type, 15-pin connector (DA-15P). Mating connector supplied.
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and
101.3 kPa (760 Torr). The mass flow controller can be calibrated to other
reference standard conditions. Specify at time of ordering.