Brooks, Model 5861 i – Brooks Instrument 5861i User Manual

Page 23

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3-7

Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008

Brooks

®

Model 5861

i

Section 3 Operation

Figure 3-5 PC Board Jumper Location and Function

* Not Used

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