Aalborg AFC - Manual (Page 23)

TABLE VI AFC SOLENOID VALVE ORIFICE SELECTION TABLE
8. TROUBLESHOOTING
8.1 Common Conditions
Your Mass Flow Meter/Controller was thoroughly checked at numerous quality
control points during and after manufacturing and assembly operations. It was cal-
ibrated in accordance to your desired flow and pressure conditions for a given gas
or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
✓
Are all cables connected correctly?
✓
Are there any leaks in the installation?
✓
Is the power supply correctly selected according to requirements?
When several meters are used a power supply with appropriate
current rating should be selected.
✓
Were the connector pinouts matched properly?
When interchanging with other manufacturers' equipment, cables
and connectors must be carefully wired for correct pin configurations.
✓
Is the pressure differential across the instrument sufficient?
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ORIFICE PART NUMBER FLOW RATE [N2]
OR.010 under 10 sccm
OR.020 10 to 1000 sccm
OR.040 1 to 5 slpm
OR.055 5 to 10 slpm
OR.063 10 to 15 slpm
OR.073 15 to 20 slpm
OR.094 20 to 50 slpm
OR.125 50 to 100 slpm