APTech BP1000 - Manual (Page 2)

Operation Manual Back Pressure Regulators
P/N 15000008 Rev 0 Page 2 of 2
d. For compression tube fittings, insert the tubing until it bottoms out in the fitting. Assemble
nut fingertight. Then tighten the nut 1-1/4 turns past fingertight for 1/4 inch to 1 inch tube
connections. For remaking connections, only tighten the nut slightly past fingertight until a
rise in torque is detected—this is typically 1/10 turn.
4. After installation, perform a leak test. A helium leak test, a pressure decay leak test, or a
bubble leak test may be used depending on the application. A helium leak test is
recommended for all face seal connections and welds per standard industry practice
(reference SEMI standard F1).
C. Operation
Note: A back pressure regulator should not be used as a positive shut-off device.
Note: Back pressure regulators operate best under constant flow conditions. A change in flow
will change the inlet pressure.
1. Perform the following to increase the regulator inlet pressure.
a. Before opening the source valve, verify that the regulator adjustment wheel is turned fully
counterclockwise (fully open position).
b. Partially open the source valve to introduce flow through the regulator.
c. Rotate the wheel clockwise to increase the inlet pressure to the desired set point.
d. Continue to open the source valve while monitoring the inlet pressure. If the inlet pressure
exceeds the desired set point, then rotate the wheel counterclockwise until the desired set
point is again reached.
e. When the source valve is fully open, verify the inlet pressure is at the desired set point.
2. Perform the following to decrease the regulator set point.
a. Open a downstream valve to initiate a flowing condition.
b. Slowly rotate the wheel counterclockwise to reduce the inlet pressure until the desired set
point is reached.
Please contact the factory or your local representative to answer questions or for further
information.