SIGMA SQM-160 - Manual (Page 11)

Chapter 1 Quick Start
1-6
1.6 Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the
procedure below to begin deposition.
Verify Sensor
Operation Verify that the Crystal Status LED for the measuring sensor is
lit, and not flashing.
Display
Rate/Thickness Display 1 should be displaying Rate on the left and Thickness
on the right. If the Crystal Life display mode is active, press
the Xtal Life switch to return to Rate/Thickness mode. If the
Program Mode is active, press Program to return to normal
mode.
Zero
Thickness If needed, press the Zero switch to zero the thickness reading.
Start
Deposition Apply power to your source evaporation supply. If the SQM-
160 shutter relay is connected, press the Shutter switch to
begin deposition.
The Rate and Thickness displays should begin to move from zero. Please take time to
review the remainder of this manual for detailed operational, programming, and safety
information.
If the displays remain at zero, check your system setup to assure that you are actually
evaporating. Also check that the deposited material is reaching the sensor.
If the display is erratic or noisy, first check your sensor connections. Refer to the
Timebase, Rate Filter and Rate Resolution sections of Chapter 2 for information that
can help in troubleshooting noisy reading problems.
If the rate and thickness readings do not match your expectations, refer to the Film
Parameter (Density, Z-Factor, Tooling) and Sensor Tooling sections of Chapter 2.