Chapter 2 operation – SIGMA SQM-160 User Manual

Page 14

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Chapter 2

Operation

2-3

The diagram and table below detail the parameters available in the Film Parameters
Menu:

Display

Description

Range

Default

Units

DENSITY

Density of the material being
deposited.

0.5 – 99.99

1.00

gm/cc

TOOLING

Overall tooling Factor for this film.
See the Sensor Tooling section of
this chapter for information on
setting tooling values.

10 – 399

100

%

Z-FACTOR

Z-Factor of the material being
deposited.

0.10 – 10.00

1.0

FINL THK

Desired Final Thickness of
deposited material. Lights Final Thk
LED. Zero is disabled.

0.000 – 99.99

0.500

THK SET

Thickness value that closes the
Thickness Setpoint relay and lights
Thk SP LED. Zero is disabled.

0.000 – 99.99

0

TIME SET

Elapsed time that closes the Timer
Setpoint relay and lights Time SP
LED. Zero is disabled.

0:00 – 99:59

0

Sec

SENS AVG

Enable/disable crystals for this film.
See the Sensor Selection section of
this chapter for more information.

Enabled/
Disabled

Ch1
Enabled

Program

Film1

Film9

.
.
.
.
.
.

- DENSITY
- TOOLING
- Z-FACTOR
- FINL THK
- THK SET
- TIME SET
- SENS AVG

- 1
- 2
- 3

- 6

.

Film Selection

Film Parameters Menu

.

Sub-Menu

Sensors 3 to 6
show only if the
four sensor
option card is
iinstalled.

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