Brooks Instrument SLAMf Series - Manual

Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Model SLAMf50S
Analog I/O MFC
with RS-485
Model SLAMf53D
Digital I/O
DeviceNet TM MFC
Brooks ® Models SLAMf50, SLAMf51, SLAMf53
Mass Flow Controllers and Models SLAMf60,
SLAMf61, SLAMf63 Mass Flow Meters
Brooks ® Industrial Digital Series MFC's and MFM's
Model SLAMf50F
Digital I/O
F OUNDATION ® Fieldbus MFC