Brooks Instrument SLAMf Series - Manual (Page 46)

3-12
Section 3 Operation Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
3-7 Calibration/Configuration Sets
All Flow Calibration parameters and some of the device configuration
parameters are saved in the device Non-Volatile Memory as “sets”. Up to
10 sets of calibration/configuration sets can be saved in order to have a
unit pre-configured for multiple gas calibration, different pressure
conditions, multiple scalings of the same gas.
Calibration and configuration data sets may be adjusted by an advanced
user via the Service Port using a special software application available
from Brooks. Reference the Brooks Service Suite User Manual for more
information about the Service Port and Service Tool software applications.
Flow Calibration Options
In addition to the factory calibration polynomial, the following calibration
options are provided to modify the factory calibration:
- Gas Correction Factor
- Calibration Scaling
- User Calibration Polynomial
Configuration Options
The following configuration parameters are stored in the Calibration/
Configuration Sets:
- P, I, and D
- Valve Offset, Span, and Leaktight Offset
- Pole Compensation and filtering
3-8 Special Features
Special Features may be adjusted by an advanced user via the Service
Port using a special software application available from Brooks. Reference
the Brooks Service Suite User Manual for more information about the
Service Port and Service Tool software applications.
3-8-1 Setpoint Ramping
The following Setpoint Ramping Options are provided:
Off – The device responds immediately to Setpoint changes.
Time – The device will Ramp Flow from the old Setpoint to the new
Setpoint in the time specified by the user in seconds.