F. labeling – APTech AP 4650 User Manual
Page 2
APTech Miscellaneous Instructions
#123650C0
AP3650, Panel Mount
Revision 2
February 5, 2013
Page 2 of 2
123650C0.doc
* A printed copy of this document is uncontrolled unless it shows a CONTROLLED COPY stamp in red. *
2.
Connect the valve inlet to 60-100 psig (4.1 - 6.9 bar) pressure nitrogen source line. Pressurize the
valve inlet. Verify there is no audible leakage across-the-seat. Open the valve and verify there is
no flow restriction in the valve. Close the valve.
3.
Perform a helium leak test to verify that the valve does not leak across-the-seat. Leak test
procedures depend greatly on equipment and operator preference. Refer to SEMI F1 for typical
leak testing protocols. If it is not possible to perform a helium leak test, then a pressure decay test
could be performed using inert gas.
F. Labeling
1.
If necessary, clean the top of the knob with adhesive removal.
2.
Apply the new label provided on the top of the valve, aligning the label’s slotted hole with the
knob’s slotted window.
Figure 1. AP3650 Valve Assembly Diagram.
Revised By: Roman Sheykhet
Engineering Approval By:
Date: 02.05.13
EAR # 5527