Chapter 5 troubleshooting and maintenance, 1 troubleshooting guide, Chapter 5 – INFICON IQM-233 Thin Film Deposition Controller PCI-Express Card Operating Manual User Manual
Page 75
5 - 1
PN
07
4-
58
4-
P1
A
IQM-233 Operating Manual
Chapter 5
Troubleshooting and Maintenance
5.1 Troubleshooting Guide
If the IQM-233 card does not function as expected, or appears to have diminished
performance, the following Symptom/Cause/Remedy charts may be helpful (see
). Additional troubleshooting information can be found in the operating
manuals for sensors, located on the Thin Film Manuals CD. If the problem cannot
be resolved, contact INFICON (refer to
section 1.3, How To Contact INFICON, on
).
CAUTION
The IQM-233 card has no user serviceable components.
Refer all maintenance to qualified INFICON personnel.
CAUTION - Static Sensitive Device
Use ESD precautions when handling the IQM-233 card.
WARNING - Risk Of Electric Shock
Potentially lethal voltages are present when the line cord,
Inputs or Outputs are connected.