8 standard query process parameters (xtc/3m only) – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

5.2.2.3.7 Standard Query Output Type Definition (XTC/3M Only)

Command:

QT <Output Number>

Output Number = <Byte> 1-20, 255 (255=all outputs)

Response:

If Output Number was 1 – 20:

<Output type>

If Output Number was 255:

< Output 1 type > < Output 2 type > … < Output 20 type >

Output type = <Byte>

0 = Normally open

1 = Normally closed

5.2.2.3.8 Standard Query Process Parameters (XTC/3M Only)

Command:

QP <Command ID> <Process Number>[<Parameter>]

Command ID = See listing below

Process Number = <Byte> 1-99

<Parameter> = Depends on Command ID (See listing that follows)

Response:

Depends on Command ID. See listing that follows

Command ID = 1 "Layer List"

Response:

<Number of Layers> <Layer 1> <Layer 2> … <Layer n>

Number of Layers = <2 Bytes> n = Number of layers in this process

Layer n = <Byte>Film number of each layer, 1 to n, when n = Number of
Layers

Command ID = 2 "Name"

Response:

<Process Name>

Process Name = <String> maximum 15 characters plus null terminating
character.

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