INFICON Cygnus 2 Thin Film Deposition Controller User Manual
Cygnus, Thin film deposition controller
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 Cygnus 2 Safety
- 1.3 How To Contact INFICON
- 1.4 Cygnus 2 Specifications
- 1.4.1 Measurement
- 1.4.2 Screens and Hierarchy
- 1.4.3 Cygnus 2 Features
- 1.4.4 ‘Display
- 1.4.5 DAC Outputs
- 1.4.6 Logic Processing
- 1.4.7 Relays / Inputs
- 1.4.8 Remote Communications
- 1.4.9 Accessories
- 1.4.10 Power
- 1.4.11 Operating Environment
- 1.4.12 Storage Temperature
- 1.4.13 Warm Up Period
- 1.4.14 Size
- 1.4.15 Installation Clearance Requirements
- 1.4.16 Weight
- 1.4.17 Cleaning
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial Power-On Verification
- Chapter 2 Installation and Interfaces
- Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 State Descriptions
- 3.5 Special Features
- Chapter 4 Sensor & Source Set-Up
- Chapter 5 Material Set-Up
- Chapter 6 General Parameters
- Chapter 7 Digital I/O
- Chapter 8 Logic Statement Set-Up
- Chapter 9 Remote Communications
- 9.1 Remote Communication Configuration Overview
- 9.2 Physical Connections
- 9.3 Message Format
- 9.4 Communication Commands
- 9.4.1 Query and Update Commands
- 9.4.2 Status Commands
- 9.4.3 HELLO Command
- 9.4.4 Query General Parameter
- 9.4.5 Update General Parameter
- 9.4.6 Query Material Parameter
- 9.4.7 Update Material Parameter
- 9.4.8 Query Sensor Parameter
- 9.4.9 Update Sensor Parameter
- 9.4.10 Query Source Parameter
- 9.4.11 Update Source Parameter
- 9.4.12 Query Process Material Parameter
- 9.4.13 Update Process Material Parameter
- 9.4.14 Query Material Name
- 9.4.15 Update Material Name
- 9.4.16 Query Input Name
- 9.4.17 Update Input Name
- 9.4.18 Query Output Name
- 9.4.19 Update Output Name
- 9.4.20 Query Output Type
- 9.4.21 Update Output Type
- 9.4.22 Query User Message
- 9.4.23 Update User Message
- 9.4.24 Query Logic Statement
- 9.4.25 Update Logic Statement
- 9.4.26 Cygnus 2 Event List
- 9.4.27 Cygnus 2 Action List
- 9.4.28 Status General
- 9.4.29 Status Material
- 9.4.30 Status Sensor
- 9.4.31 Remote General Action
- 9.4.32 Remote Material Action
- 9.4.33 Cygnus 2 Communications Examples
- 9.4.33.1 General Command Packet Format
- 9.4.33.2 General Response Packet Format
- 9.4.33.3 HELLO Command, ASCII name and version
- 9.4.33.4 Query Material Parameter, Z-Ratio (2), Material 1
- 9.4.33.5 Update Material Parameter, Control Loop (4), Material 1, PID (2)
- 9.4.33.6 Query Sensor Parameter, Shutter Output (1), Sensor 1
- 9.4.33.7 Update Sensor Parameter, Sensor Type (2), Sensor 1, CrystalTwo (1)
- 9.4.33.8 Query Source Parameter, Shutter Output (2), Source 1
- 9.4.33.9 Update Source Parameter, Number of crucibles (3), Source 1, 4 crucibles (1)
- 9.4.33.10 Query Material Name, Material 1
- 9.4.33.11 Update Material Name, Material 1, “SILVER”
- 9.4.33.12 Query Input Name, Input 1
- 9.4.33.13 Update Input Name, Input 1, “P1”
- 9.4.33.14 Query Output Name, Output 1
- 9.4.33.15 Update Output Name, Output 1, “SHUTTER”
- 9.4.33.16 Query Output Type, Output 1
- 9.4.33.17 Update Output Type, Output 1, Normally Closed (1)
- 9.4.33.18 Query User Message, Message 1
- 9.4.33.19 Update User Message, Message 1, “HELLO!”
- 9.4.33.20 Query Logic Statement, Statement 1
- 9.4.33.21 Update Logic statement, Statement 1, “IF External Input 1 THEN Start 1”
- 9.4.33.22 Status Material, Thickness (4), Material 1
- 9.4.33.23 Status Sensor, Crystal Life (0), Sensor 1
- 9.4.33.24 Remote General Action, Stop All
- 9.4.33.25 Remote Material Action, Open Source Shutter (8)
- 9.4.33.26 Example for Interpreting Float Responses
- Chapter 10 Maintenance and Calibration Procedures
- Chapter 11 Counters & Timers
- Chapter 12 USB Storage
- Chapter 13 Troubleshooting, Status and Error Messages
- 13.1 Status Messages
- 13.2 User Messages
- 13.3 STOP messages
- 13.4 Transient Messages
- 13.5 Input Error Messages
- 13.6 Troubleshooting Guide
- 13.7 Replacing the Crystal
- 13.8 Crystal Sensor Emulator IPN 760-601-G1 or 760-601-G2
- Chapter 14 Measurement and Control Theory
- Appendix A Material Table
- Index