INFICON Cygnus 2 Thin Film Deposition Controller User Manual
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Cygnus 2 Operating Manual
ION ASSIST DEPOSIT . . . . . . . . . . No (0), Yes (1).
Sets the logic condition to True if Yes (1) is selected and the Deposit state is
entered. Default is No (0).
ON FINAL THICKNESS . . . . . . . . . Continue (0), Post-Dep (1), NonDepCntl (2).
Selects the state to enter after reaching Final Thickness. Standard processing
will continue with Post-Deposit (1), the default setting. In special cases,
Non-Dep(osit)Cntl(Control) (2) may be appropriate. In this state, the rate is
controlled but thickness is not incremented and the Source shutter relay is not
active. Continue (0) ignores reaching Final Thickness but the logic condition is
set to True.
CAUTION
The Sensor must be positioned so the rate can be
monitored with the source shutter closed when going to
the non-deposit control state.
FINAL THICKNESS. . . . . . . . . . . . . 0 to 999.99 kÅ
This is the thickness setting that triggers the end of the DEPOSIT state. A value
of 0.000 kÅ allows skipping the deposit state. The Source Shutter and Sensor
Shutter relays return to their normal states and the Material enters the Idle
Ramp or the Feed Ramp state. The default value is 0.000 kÅ, see Skip Deposit,
THICKNESS LIMIT . . . . . . . . . . . . . 0.0 to 999.99 kÅ
This sets the thickness at which the Thickness Limit logic state is set True. This
thickness begins to accumulate after entering the Deposit state. The state
remains active after reaching Thickness Limit until the beginning of the IDLE
state. The default value is 0.000 kÅ.
RAMP 1 RATE. . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s
Rate Ramp 1 is provided to effect a rate change while depositing a Material.
The aggregate rate is ramped linearly from the original rate setpoint to the New
Rate 1 value over the time interval Ramp 1 Time. It is allowed to ramp to a
higher or a lower rate. The default value is 0.0.
START RAMP 1 . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This value sets the thickness at which to start the Rate Ramp. This thickness
value must be less than the Start Ramp 2 thickness value if the value of Start
Ramp 2 is non-zero. A value of zero disables the feature. The default value is 0.