INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 138
MDC-370 DEPOSITION CONTROLLER
Sensor#1 Backup Crystal #
1
27
*
(1-8)
None
Sensor#2 Crystal Fail
1
28
*
2 = Not Used
3 = Disabled
4 = HaltLast
5 = Halt
6 = TimePwr
7 = Switch
Sensor#2 Primary Crystal #
1
29
*
(1-8)
None
Sensor#2 Backup Sensor #
1
30
*
(1-6)
None
Sensor#2 Backup Crystal #
1
31
*
(1-8)
None
Sensor#3 Crystal Fail
1
32
*
2 = Not Used
3 = Disabled
4 = HaltLast
5 = Halt
6 = TimePwr
7 = Switch
Sensor#3 Primary Crystal #
1
33
*
(1-8)
None
Sensor#3 Backup Sensor #
1
34
*
(1-6)
None
Sensor#3 Backup Crystal #
1
35
*
(1-8)
None
Sensor#4 Crystal Fail
1
36
*
2 = Not Used
3 = Disabled
4 = HaltLast
5 = Halt
6 = TimePwr
7 = Switch
Sensor#4 Primary Crystal #
1
37
*
(1-8)
None
Sensor#4 Backup Sensor #
1
38
*
(1-6)
None
Sensor#4 Backup Crystal #
1
39
*
(1-8)
None
Sensor#5 Crystal Fail
1
40
*
2 = Not Used
3 = Disabled
4 = HaltLast
5 = Halt
6 = TimePwr
7 = Switch
Sensor#5 Primary Crystal #
1
41
*
(1-8)
None
Sensor#5 Backup Sensor #
1
42
*
(1-6)
None
Sensor#5 Backup Crystal #
1
43
*
(1-8)
None
Sensor#6 Crystal Fail
1
44
*
2 = Not Used
3 = Disabled
4 = HaltLast
5 = Halt
6 = TimePwr
7 = Switch
Sensor#6 Primary Crystal #
1
45
*
(1-8)
None
Sensor#6 Backup Sensor #
1
46
*
(1-6)
None
Sensor#6 Backup Crystal #
1
47
*
(1-8)
None
COMPUTER INTERFACE
11-8