INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 52)

MDC-370 DEPOSITION CONTROLLER
This parameter sets a maximum limit for the rate establish error, which must not
be exceeded for a five-second period during the rate establish state, in order for
the controller to enter the deposit state.
18. Deposit Rate #1 (0.0 to 999.9 Å/sec)
This parameter defines the first deposition rate.
19. Ramp Start Thk #1-4 (0 to 100%)
This parameter sets the layer thickness percentage that will trigger the start of a
rate ramp. The MDC-370 supports four rate ramp. The following Ramp Stop Thk
parameter sets the layer thickness percentage for the end of the rate ramp.
Finally, the next Deposit Rate parameter sets the deposition rate until either the
end of the layer or the beginning of the next rate ramp.
A setting of 100% disables the rate ramp function. Please note that all the Ramp
Start Thk parameters can also be used as thickness setpoints for triggering I/O
events without using the ramping feature. For example, if you wanted to trigger
an event after 10% of the layer, your would set the Ramp Start Thk = 10%, Ramp
Stop Thk = 10% and the next Deposit Rate equal to the first deposit rate. Then
you would use the Deposit #2 State condition in the output's or action's condition
string that you wanted to trigger.
20. Ramp Stop Thk #1-4 (0 to 100%)
This parameter defines the layer thickness percentage that will trigger the end of a
rate ramp. This parameter will not be displayed if this feature is disabled based
on the settings of the prior parameter.
21. Deposit Rate #2-5 (0.0 to 999.9 Å/sec)
This parameter defines the target rate that will follow the prior rate ramp. This
rate will continue until either the end of the layer or the beginning of the next rate
ramp. This parameter will not be displayed if this feature is disabled based on the
settings of the prior parameters.
22. Time Setpoint (0 to 9:59:59)
This parameter defines the time from the start of the layer until the time setpoint
event is triggered.
23. Ramp To Feed Time (0 to 9:59:59)
This parameter defines the time allowed for the source power to go from the last
deposition power to the Feed Power. The default for this parameter is zero.
24. Feed Power (00.0 to 99.9%)
The Feed Power parameter defines the source power level during the feed state.
25. Feed Time (0 to 9:59:59)
The Feed Time parameter sets the feed time. This parameter can also be used as a
delay between the Deposit State and the idle state. The default for this parameter
is zero which disables the feed function.
PROGRAMMING AND CONTROLLER SETUP 4-20