10 appendix a, 1 endpoint detection with the plascalc system – Ocean Optics PlasCalc User Manual
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Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology
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10 Appendix A
10.1 Endpoint detection with the PlasCalc system
General remarks
In the following a step-by-step instruction is presented for setting up an endpoint detection
recipe for the OCEAN OPTICS PlasCalc system. In the following it is assumed that you
are familiar with the basic functions of the OCEAN OPTICS PlasCalc system.
A. First time data acquisition
While a typical process cycle is running, acquire spectra from the plasma. Save all
recorded spectra on your PC (hard disk) by selecting this option either in the Record
Option dialog
or in the Monitor Option dialog:
Important: During the process cycle please write down the number of the spectra which
are recorded before and after the endpoint.
B. Identification of process relevant plasma particles