Models 5800-s, Installation and operation manual, Appendix a – Brooks Instrument 5800S Series User Manual
Page 31
Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
31
Nitrogen Dioxide
NO2
0,758
1,713
2,052
Nitrogen Trifluoride
NF3
0,501
1,598
3,168
Nitrogen Trioxide
N2O3
0,443
1,649
3,389
Nitrosyl Chloride
NOCL
0,644
1,529
2,913
Nitrous Oxide
N2O
0,752
1,259
1,964
Octofluorocyclobutane C4F8
0,169
2,672
8,933
Oxygen
O2
0,988
1,067
1,429
Oxygen Difluoride
OF2
0,672
1,388
2,402
Ozone
O3
0,738
1,31
2,138
Perchloryl Fluoride
CLO3F
0,448
1,905
4,571
Perfluorobutane
C4F10
0,738
2,918
10,61
Perfluoro-2-Butene
C4F8
0,268
2,672
8,933
Perfluoromethyl-vinylether (PMVE)
PMVE
0,296
2,029
5,131
Perfluoropropane
C3F8
0,179
2,591
8,396
Pentane (n-Pentane)
C5H12
0,212
1,605
3,222
Pentafluoroethane
C2HF5
0,287
2,07
5,36
Phosgene
COCL2
0,504
1,881
4,418
Phosphine
PH3
0,783
1,1
1,517
Phosphorous Pentafluoride
PF5
0,346
2,109
5,62
Phosphorous Trifluoridide
PF3
0,495
1,77
3,906
Propane (same as CH3CH2CH3)
C3H8
0,343
1,274
2,008
Propylene (Propene)*
C3H6
0,401
1,234
1,875
Rhenium Hexafluoride
ReF6
0,23
3,279
13,41
Silane
SiH4
0,625
1,07
1,44
Silicon Tetrachloride
SiCL4
0,31
2,462
7,579
Silicon Tetrafluoride
SiF4
0,395
1,931
4,648
Sulfur Dioxide
SO2
0,728
1,529
2,858
Sulfur Hexafluoride
SF6
0,27
2,348
6,516
Sulfur Tetrafluoride
SF4
0,353
1,957
4,776
Sulfur Trioxide
SO3
0,535
1,691
3,575
Sulfuryl Fluoride
SO2F2
0,423
1,931
4,648
Tetrachloromethane
CCL4
0,344
2,345
6,858
Tetrafluoroethylene (TFE)
C2F4
0,361
1,905
4,526
Tetrafluorohydrazine
N2F4
0,367
1,926
4,624
Trichlorofluoromethane (f-11)
CCL3F
0,374
2,244
6,281
Trichlorosilane
SiHCL3
0,329
2,201
6,038
Trimethyloxyborane (TMB)
B(OCH3)3
0,3
1,929
4,638
1,1,2-Trichloro-1,1,2-Triflouroet (f-113)
C2CL3F3
0,231
2,52
7,92
Trimethylamine
(CH3)3N
0,316
1,467
2,639
Tungsten Hexafluoride
WF6
0,227
3,264
13,28
Uranium Hexafluoride
UF6
0,22
3,548
15,7
Vinyl Bromide
C2H3Br
0,524
1,985
4,772
Vinyl Chloride
C2H3CL
0,542
1,492
2,788
Vinyl Fluoride
C2H3F
0,576
1,281
2,046
Water Vapor
H2O
0,861
0,802
0,804
Xenon
Xe
1,383
2,18
5,851
Gas Conversion Table (continued)
Appendix A