Brooks Instrument 5800S Series - Manual (Page 8)

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
8
•
selectable soft start
•
adaptive valve control
⇒
Adaptive filtering for signal flow component
•
Alarms
⇒
Self-diagnostic
•
EEPROM error
•
database error
•
analogue output error
⇒
Out-of-range indications
•
for analogue set points higher than 100% (controller only)
•
flow
•
valve (controller only)
•
analogue output
⇒
Environmental errors
•
no gas flow detected
•
power supply outside specification range
•
ambient temperature outside specified range
•
high and low flow alarms
Section 1: Introduction